DMS - carrier/pod cleaner


	CARRIER/POD CLEANER		M604 - Cleaner
			The M604 fully automatic central force cleaner is the perfect solution for the automatic cleaning application. The humidity is controlled using a condensation system. The system uses a closed cleaning chamber. Any carrier such as FOUP, FOSB or RSP can be cleaned automatically or in manual mode. Fully automated cleaning Internal buffer Manual operation possible OHT interface Class 1 mini-environment & ESD Highest throughput IR drying technology Semi Standard compliant SECS / GEM interface No exhaust
	S2 and S8 certified