DMS-Semiconductor Equipment
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CARRIER/POD CLEANER M600 - Cleaner
(not available in the USA) US Version
M600 cleaner
The M600 fully automatic central force cleaner is the perfect solution for the automatic cleaning application. Any kind of carriers such as FOUB, FOSB or RSP can be cleaned automatically or in manual mode.
  • Fully automated cleaning
  • Internal buffer
  • Manual operation possible
  • OHT interface
  • Class 1 mini-environment & ESD
  • Highest throughput
  • IR drying technology
  • Semi Standard compliant SECS / GEM interface
S2 and S8 certified