DMS-Semiconductor Equipment
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WAFER SORTER M30
M30
The M30 is a state of the art wafer sorter for 300 mm. The machine is configureable with 2 or 4 load ports and uses FOUP and autodoor FOSB for fully automatic operation. Fab automation control and overhead transfer (OHT) is optional.
  • Throughput up to 400 wph
  • Width 2200 mm, footprint 4,66 m²
  • Cognex ID reader
  • Semi Standard compliant SECS / GEM interface
  • OHT interface
  • Highest reliability, low maintenance
S2 and S8 certified