WAFER SORTER		M30
			The M30 is a state of the art wafer sorter for 300 mm. The machine is configureable with 2 or 4 load ports and uses FOUP and autodoor FOSB for fully automatic operation. Fab automation control and overhead transfer (OHT) is optional. Throughput up to 400 wph Width 2200 mm, footprint 4,66 m² Cognex ID reader Semi Standard compliant SECS / GEM interface OHT interface Highest reliability, low maintenance
	S2 and S8 certified

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