DMS-Semiconductor Equipment
WAFER STOCKER M2000 - wafer stocker vertical storage
M2000
The bare wafer stocker M2000 reduces tremendously the total cost of ownership. It stores, retrieve and sorts automatically single wafer from FOUP/FOSB. The vertical storage of the wafer allow an even higher storage density. The wafer management software is according to Semi E40 and E94.
  • Fully automated single wafer storage
  • Storage density 2.5 mm pitch
  • Capacity up to 10.000 wafer - small footprint
  • N2 / XCDA purge optional
  • Single wafer tracking
  • OHT inferface
  • Separate compartments to avoid cross contamination
  • FOUP buffer
  • FOUP purge
S2 and S8 certified