DMS-Semiconductor Equipment
WAFER STOCKER M2000 - wafer stocker horizontal storage
M2000
The bare wafer stocker M2000 reduces tremendously the total cost of ownership. It stores, retrieve and sorts automatically single wafer from the FOUP. The wafer stocker includes FOUP buffer and allows to prepare wafer ready for production. The wafer management software is according to Semi E40 and E94.
  • Fully automated single wafer storage
  • Capacity up to 2.000 wafer - small footprint
  • N2 / XCDA purge optional
  • Single wafer tracking
  • OHT interface
  • Separate compartments to avoid cross contamination
  • FOUP buffer
  • FOUP purge
S2 and S8 certified