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WAFER SORTER
M20
The M20 is a state of the art wafer sorter for transfering 150 mm, 200 mm wafers. The system is equipped with two cassette stations, up to two pre-aligners and wafer ID reader.
Throughput up to 400 wph
Width 530 mm, footprint 0.643 m²
Cognex ID reader
Highest reliability, low maintenance
S2 and S8 certified
© DMS 2006