RETICLE CHANGER		M2 reticle changer
			The reticle changer transfers the reticles from one carrier to another or to a metrology equipment. It unloads and transfers the reticles secure from any type of cases or pods. The reticle management software controls and monitors the history of the reticles. Fully automated reticle box exchanger Class 1 mini-environment / ESD / AMC Integrated N2 blow off I / O stations for all reticle cases Embedded metrology tool Compact design and user friendly operation (GUI)
	S2 and S8 certified

© DMS 2006