DMS - reticle stocker


	RETICLE STOCKER		M1990 - bare reticle stocker
			The fully automatic bare reticle stocker stores up to 2000 reticles. It allows fast storage and retrieval of 5 " and / or 6 " reticles. The reticle management software controls and monitors history of the reticles. Fully automated fast reticle / mask handling Class 1 mini-environment / ESD / AMC N2 / XCDA purge optional High capacity – small footprint Embedded metrology tool Buffer station OHT interface
	S2 and S8 certified