DMS-Semiconductor Equipment
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RETICLE STOCKER M1900 - fully automated box reticle stocker
M1900 fully auto
The DMS M1900 is a fully automatic semi-bare stocker that stores up to 7400 reticles. The reticles are stored in anti-static semi bare cases. Individual I / O stations for all reticle cases.
  • Fully automated reticle / mask handling
  • Class 1 mini-environment / ESD / AMC
  • Reticle changer function
  • N2 / XCDA purge to prevent haze growth
  • High capacity – small footprint
  • Embedded metrology tool
  • Buffer station
  • Manual back up possible
  • OHT inferface
  • N2 blow off
S2 and S8 certified